Abstract
ABSTRACT The semiconductor industry accounts for 1.3%-2% of the total US electricity consumption in the manufacturing sector. Energy in the form of electricity is required to operate the manufacturing process equipment, maintain the cleanroom conditions, and operate heating ventilation and air conditioning (HVAC) units and chillers. As a significant amount of energy is used by some of the manufacturing process, it becomes necessary to determine process parameters that impact power and energy consumption. Energy-intensive processes such as layering and diffusion are studied, and process parameters most sensitive to power and energy consumption have been determined. A computer-based interactive model was developed in this research to estimate the energy requirement of specific processes in semiconductor manufacturing. This article reports a sensitivity analysis of key process variables with respect to power and energy consumption.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
