Endlessly single-mode photonic-crystal vertical-cavity surface-emitting lasers

Abstract

We describe a robust manufacturing process for single-mode photonic crystal (PhC) vertical-cavity surface-emitting lasers (VCSELs). The fabrication of the PhC VCSELs is based on a high tolerance manufacturing process only using optical lithography. We investigate various photonic crystal designs to determine endlessly single mode designs, whereby the same photonic crystal design yields single mode operation for three different wavelengths (780 nm, 850 nm, and 980 nm). The PhC VCSELs demonstrate a maximum output power greater than 1 mW under continuous wave operation with side-mode suppression ratio greater than 35 dB.