Abstract

Polycrystalline Cu2O thin films are prepared on c‐sapphire substrates and n‐type templates by radio frequency sputtering at a temperature of 650 K employing a metallic target, an argon/oxygen gas mixture as well as a biased semi transparent electrode placed between the target and the substrate. Introducing that grid, we demonstrate the possibility to tune the cuprous oxide thin film properties, especially the morphology, by controlling the electron temperature in the plasma as well as the beneficial effect of a suspected reduction of interface state densities at photovoltaic heterostructures.

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