Abstract
Vanadium dioxide (VO2), one of the most promising phase-change smart materials, has shown strong frequency tuning capabilities in MEMS resonators. In this paper, we demonstrate the potential use of VO2-based MEMS devices as second-order kilohertz (kHz) bandpass filters with tunable band selectivity and adjustable bandwidth (BW). Two identical on-chip micro resonators are actuated using mechanical excitation and measured using optical detection. One of the resonators is not actuated while the other is tuned by applying electric currents across an integrated resistive heater, which induces the phase transition of the VO2, and consequently a large stress to the mechanical structure. The responses of both MEMS resonators are combined, resulting in a resonant peak of tunable BW controlled by the input current. The BW can be extended to 2.62 times by using two bridges or 2.39 times by implementing one pair of cantilevers. The results for both devices are discussed.
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