Abstract
We have improved an emission stability of Mo tips FEA (field emitter array). The effect of DLC (Diamond Like Carbon) films coated by layer-by-layer technique using PECVD on the electron emission characteristics of Mo tips FEA is examined. Turn-on voltage was lowered from 80 V for Mo tips to 65 V for DLC coated Mo tips FEA and maximum emission current was increased from 140 /spl mu/A for Mo tips to 320 /spl mu/A for DLC coated Mo tips FEA. An anode current for DLC coated Mo tips and Mo tips FEA of 0.1 /spl mu/A per emitter are measured at the gate voltage of about 87 V and 107 V, respectively. Add the emission current of DLC coated Mo tips FEA was more stable than that of Mo tips FEA.
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