Abstract
Low-pressure inductively coupled N2-Ar plasmas have been studied to investigate the effects of operating parameters, including the Ar content, applied power, and gas pressure. By means of optical emission spectroscopy and single and double Langmuir probe diagnostic techniques, the evolutions of the plasma density, the electron temperature, and the N2 +, N2, N, and Ar emission lines have been investigated with a discussion of a spatially-averaged global model. From the emission spectra, the ratios of the concentrations of species of interest, and the rotational and the vibrational temperatures of the nitrogen molecules are obtained for various discharge conditions. The rotational and the vibrational temperatures of N2 are found to increase with increasing applied power, pressure, and Ar content, thus making nitrogen plasmas more reactive.
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