Emission Spectrometric Evaluation of a Hollow-Cathode Glow Discharge Plasma with Helium–Oxygen Mixed Gas for Surface Modification of Co–Cr–Mo Alloy

Abstract

This paper represents emission spectrometric analysis of a hollow-cathode glow discharge plasma with helium–oxygen mixed gas for surface treatment of a cobalt-based alloy, together with surface analysis of the resulting oxide layer. A Co–28Cr–6Mo alloy was employed as a specimen. The objective of this work is to obtain plasma information for the operating conditions to be optimized for producing a stoichiometric oxide layer on the alloy surface. Helium atomic lines, atomic and ionic lines of oxygen atom, and band heads of oxygen molecule ion were observed in the emission spectra. These intensities drastically changed depending on a mixing ratio of helium–oxygen mixed gas; particularly, the emission intensity of the molecular bands was largely enhanced in the mixed gas plasma compared to the pure oxygen plasma. This band spectrum is assigned to an electronic transition from the 4 Σ g to 4 Π u states of oxygen molecule ion, whose excitation energies are 18–19 eV from the ground state of oxygen molecule. It is thus suggested that a Penning-type ionization process with metastables of helium atom (1s2s 1 S 0, 20.6 eV and 3 S 1, 19.8 eV) is an excitation mechanism how the number density of the corresponding excited state can be elevated in the helium–oxygen mixed gas plasma. This effect, which more populated the excited oxygen species in the plasma, also exerted influence on the resultant oxide layer, such as the chemical composition and the layer thickness. Surface analysis by X-ray photoelectron spectroscopy indicated that an oxide layer consisting of iron and chromium oxides was formed by this plasma treatment, and that chromium atom was enriched in it. The thickness of the oxide layer varied with a mixing ratio of the plasma gas.