Abstract
Emission spectra of SiF3 radical were observed from photodissociative excitation of SiF4 at 99.1, 95.5, and 92.3 nm. The spectra show a broad visible band in the 350–800 nm region, a UV band in 290–340 nm, and a weak band in 240–280 nm. The visible band resembles the chemiluminescence spectra observed from etching of silicon by F or XeF2.
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