Abstract
The dependences of the VUV light intensity from an electrodeless Argon gas discharge on various parameters such as the gas pressure, gas flow rate, input voltage, input current and discharge current were investigated. These data can be utilized in designing this type of VUV light source. The peak intensity of the light in the 50 to 110 nm wavelength region was estimated to be about 1.8×10-4 W/cm2 at the output aperture of the discharge tube.
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