Abstract
Volcano-structured double-gated field emitter arrays (VDG-FEAs) with different focusing electrode height have been fabricated and the focusing characteristics for each VDG-FEAs were evaluated in detail. The authors experimentally proved that lowering the focusing electrode was very effective to keep a high emission current and successfully removed the electric field relaxation at the tip during the focusing operation. The anode current of about 1.9μA was maintained for the VDG-FEA with the height of the focusing electrode relative to the extraction electrode, hf=−470nm, even in applying 5V to the focusing electrode, and the current was 84.4 times larger, compared with the sample with hf=220nm under the same focusing condition. It was found that the emitted electrons returned back to the extraction electrode by the potential barrier caused by the low focusing potential below 3V in every sample.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
