Abstract
In this work we address key fabrication issues, specific to fabricating an embedded single mode waveguide system for the telecommunication window. These are the control of adhesion between polymer layers and filling in cavities on pre-patterned polymer substrates. We report the fabrication of two embedded polymer single-mode waveguides, namely, polystyrene/Teflon ® AF and mr-L 6000/Teflon ® AF, fabricated by means of electron beam lithography and/or nanoimprint lithography. For both waveguides, it is possible to realize a low confinement of the guided mode in the core due to the low refractive index contrast between the core material and the cladding layer (around 0.05–0.2). This gives the flexibility to reduce waveguides optical losses if the losses of the core polymer are too high, which is usually the case in near infrared for most polymers.
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