Abstract
Highlights Elliptical vibration chiseling is proposed based on a game-changing process principle for the high-efficient texturing of ultrahigh-aspect-ratio surface microstructures. Uniformed microstructures with an aspect ratio of 2–12 in the spacing scale of 1–10 μm have been successfully fabricated using elliptical vibration chiseling. The developed process model of elliptical vibration chiseling has been verified by the measured results of the microstructures’ geometric parameters. An inclined elliptical trajectory of tool vibration is more suitable for elliptical vibration chiseling than the standard elliptical trajectory. The deterministic process effects on the surface generation of microstructure in elliptical vibration chiseling have been demonstrated.
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