Ellipsometric sensitivity to halothane vapors of hexamethyldisiloxane plasma polymer films

Abstract

A halothane vapor sensor based on hexamethyldisiloxane (HMDSO) plasma polymer films have been studied using an ellipsometric technique. The sensor signals, i.e. the ellipsometric parameters ψ and Δ of a HMDSO film change reversibly upon exposure to halothane vapors. The sensor shows very good repeatability and stability. Our study also revealed that the sensitivity and response time depend strongly on the film deposition conditions and a film with a high refractive index has low sensitivity to halothane and longer response time.