Abstract
Optical characterization of the Cu 2+ , Al 2+ and Cr 2+ ions implanted copper, aluminum and stainless steel mirrors respectively as well as the stainless steel mirrors with boron coatings was carried out by multiple angle of incidence ellipsometry. Both implanted and nonimplanted areas for aluminum, copper and stainless steel mirrors was then sputtered and probed. Changes of the optical properties of the stainless steel samples after bombardment by Cr 2+ would occur due to the formation of a carbon layer on a mirror surface after the implantation, without modification of a microstructure of the surface. In case of the copper mirrors, irradiated by Cu 2+ ions and aluminum mirrors implanted by Al 2+ ions, the changes of optical parameters would be associated with modification of the subsurfaces layers' microstructure. The optical parameters and thicknesses of boron films on the stainless steel substrate were determined and were 7.3 nm and 16.8 nm respectively.
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