Abstract

Toward controlling the metal-insulator transition (MIT) of VO2 in a facile method for dynamically tuning infrared transmission, we report one-step VO2 thin film deposition on FTO/glass substrate without post annealing using the reactive sputtering deposition technique. The MIT of VO2 thin films and their infrared modulation characteristics were investigated. Using the FTO underlayer as a resistive heating element, the MIT of large area VO2 thin films can be easily achieved. Dynamic tuning the infrared transmission or abrupt infrared switching through voltage control was demonstrated. Our results suggest that voltage driven VO2/FTO/glass through electrothermally control VO2 phase change can be a promising candidate for smart window and infrared switching applications.

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