Abstract
A compact polysilicon surface-micromachined thermal actuator-based vibromotor has been designed and fabricated. Mechanical power transmission occurs during the impact of the thermal actuators on the sides of a movable guided element (slider.) Bi-directional operation is made possible through the impact head design. The thermal actuators have been driven at frequencies up to 10 kHz. A traveling speed of 3 mm s has been demonstrated with an AC input voltage of 2.0 V at 5 kHz plus a 10.0-V DC bias offset. A polysilicon hinged vertical micromirror has been moved for a full range of 350 mu m.
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