Abstract
An electrostatically driven tunable radio frequency (RF) inductor with large inductance tuning range consisting of electroplated soft magnetic permalloy (Ni80Fe20 alloy) plate was proposed in this paper. The fabricated tunable inductor exhibits a large tunable inductance range up to 77.8%, together with improved quality factor (Q-factor) at high frequencies. Such tunability of inductance and Q-factor was due to the magnetoelectric coupling effect between the soft magnetic permalloy plate and the spiral inductor, which lead to the magnetic flux of the inductor and mutual inductance change. The concept of tuning inductance by using electroplated soft magnetic permalloy has large potential for wide range RFIC applications.
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