Abstract
Radio frequency microelectromechanical system (RF MEMS) is a promising technology in the field of wireless communications. MEMS mixers and filters offer remarkable advantages in term of size, cost, and power consumption over conventional devices. One of the MEMS materials that have very good mechanical and electronic characteristics is Silicon carbide (SiC). In this work, A SiC electrostatic actuator, resonating at fundamental frequency of 66.64 kHz, was fabricated and designed to perform frequency mixing. Two signals with different frequencies were multiplied and the sum, as well as the difference of the two frequencies, was used to drive the fabricated cantilever into resonance.
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