Abstract
A pseudo-three-layer electrostatic repulsive out-of-plane actuator is proposed. It combines the advantages of two-layer and three-layer repulsive actuators, i.e., fabrication requirements and fill factor. A theoretical model for the proposed actuator is developed and solved through the numerical calculation of Schwarz-Christoffel mapping. Theoretical and simulated results show that the pseudo-three-layer actuator offers higher performance than the two-layer and three-layer actuators with regard to the two most important characteristics of actuators, namely, driving force and theoretical stroke. Given that the pseudo-three-layer actuator structure is compatible with both the parallel-plate actuators and these two types of repulsive actuators, a 19-element two-layer repulsive actuated deformable mirror is operated in pseudo-three-layer electrical connection mode. Theoretical and experimental results demonstrate that the pseudo-three-layer mode produces a larger displacement of 0–4.5 μm for a dc driving voltage of 0–100 V, when compared with that in two-layer mode.
Highlights
At last the proposed actuator is validated with experimental measurements based on a 19-element deformable mirror (DM) that was developed through commercially available multi-user microelectromechanical systems (MEMS) processes (MUMPs)[25]
The three-layer actuator has a large fill factor, it requires three structural layers, which increase the difficulty of device fabrication
The results show that as G decreases, the electrostatic force increases, while the position where the repulsive force decreases to 0 decreases
Summary
One side of AC is presented to a fixed electrode with the same potential, thereby changing the field distribution and suppressing the applied attractive force to the aforementioned side of AC, fD. This electrode is called the suppressing electrode (SU). A novel pseudo-three-layer repulsive actuator is proposed and analyzed through a physical model developed here. Based on this model, the effect of varying structural parameters on the electrostatic force of the actuator and the comparison of three repulsive actuators is summarized. At last the proposed actuator is validated with experimental measurements based on a 19-element deformable mirror (DM) that was developed through commercially available multi-user MEMS processes (MUMPs)[25]
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