Electrostatic probe diagnostics of a planar-type radio-frequency inductively coupled oxygen plasma

Abstract

An inductively coupled oxygen radio-frequency (13.56 MHz) discharge is investigated based on modeling and experiment. Experimental measurement is done at a range of gas pressure of 1–30 mTorr, and rf power of 100–1000 W. We measure most of the important plasma parameters such as the densities of charged species, electron temperature, plasma potential, and electron energy distribution function. The measured values are compared with the results of the spatially averaged global model. We observe a generally good agreement between the modeling and the experiment. The scaling features, the transition of the operating region, and the radial distributions of charged species are also discussed.