Abstract
A simplified two-dimensional Monte Carlo simulation is performed to estimate the charging potential fluctuations caused by strong binary Coulomb interactions between discrete charged particles in nanometer scale trenches. It is found that the discrete charge effect can be an important part of the nanoscale trench research, inducing scattering of ion trajectories in a nanoscale trench by a fluctuating electric field. The effect can enhance the ion deposition on the side walls and disperse the material contact energy of the incident ions, among others.
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