Abstract
A flexure-based rotary electrostatic microactuator is described. This microactuator is for application in a high track-density hard disk drive (HDD). It is fabricated using a high aspect-ratio stencil electroplating process. This paper emphasizes the practical system-level issues that affect the device design. The micro-actuator is demonstrated in a 3.5 form-factor HDD. With a servo bandwidth of 5 kHz, a one-track seek can be completed in under 0.2 ms. This batch-fabricated electro-static microactuator provides a low-cost, high-performance solution for achieving very high track-densities.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
