Abstract

An electret electrostatic MEMS vibration energy harvester for tire sensors mounted inside of the tire tread is reported. The device was designed so as to linearly change an electrostatic capacitance between the corrugated electret and output electrode according to the displacement of the proof mass. The electromechanical linearity was effective at reducing the power loss. The output power reached 495 μW under sinusoidal vibration despite the footprint size being as small as 1 cm2. Under impact vibration inside of the tire tread, the output power reached 60 μW at a traveling speed of 60 km/h. It was revealed that a higher mechanical resonance frequency of the harvester adjusted within the frequency band of a low-power spectral density of impact vibration acceleration was effective for high efficiency harvest impact vibration energy.

Highlights

  • In order to improve the driving safety of automobiles, the requirements of tire pressure monitoring systems (TPMS) have advanced worldwide, starting with the United States and Europe

  • We developed vibration energy harvesters inside of a tire tread

  • By making the electret into a corrugated structure, a capacitance change could be obtained since the distance from the convex portion or the concave portion to the output electrode varied

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Summary

Introduction

In order to improve the driving safety of automobiles, the requirements of tire pressure monitoring systems (TPMS) have advanced worldwide, starting with the United States and Europe. The electret vibration energy harvesters are classified mainly as the in-plane overlapping type [4] and the out-of-plane gap-closing. Reported: Methods a higher for enhancement of accumulated charges on the output electrodes are reported:. Optimization optimization is reported, a smaller gap between electrets andStructural output electrodes [12], isand a reported, a smaller air gap between electrets and output electrodes [12], and a mechanical nonlinearity mechanical nonlinearity with a spring stopper [13,14] In most of these works, vibration energy with a spring [13,14]. For the TPMS and the tire sensors, electret vibration energy harvesters have to be evaluated considering the thereal realimpact impactvibration vibration inside of the tread.

Basic Concept of an Electrostatic MEMS Vibration Energy Harvester
Electrode Configuration for High Power Generation
Electret Structure for a High Charge Ratio on Output Electrodes
Process Flow
Annealing
Result
Output
Impact Vibration in Tire Tread
Conclusions
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