Abstract
The effect of hydrogen exposure on the properties of catalytic Pt∕AlGaN∕GaN heterostructures is investigated by electroreflectance spectroscopy. The technique is based on the analysis of the Franz–Keldysh oscillations observed above the AlGaN band gap and yields the electric-field strength in the AlGaN barrier. From these data, the hydrogen-induced changes of the two-dimensional electron gas (2DEG) concentration underneath the catalytic gate contact are quantitatively determined. The exposure increases the 2DEG concentration by 1.7×1012e/cm2 (1.3×1012e/cm2) and decreases the Schottky barrier height by 0.85V (0.65V) for barrier Al contents of 0.15 (0.20).
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