Abstract
Patterned SmCo thin films were electroplated from an aqueous solute containing glycine by using dc and pulse dc current on the beaker level. Micromolds prepared by photolithography allow an accurate pattern transfer for patterned deposition of the material. A flux guide of a magnetic microactuator was chosen as a pattern, and Al2O3 was used as the substrate. Au and Cr were investigated as seed layer materials. The content of Sm in the SmCo films is strongly dependent on the applied cathodic current density. A relative Sm content of up to 13.8 at. % could be determined by energy dispersive x-ray (EDX) spectroscopy. The SmCo thin films were annealed at 560 °C in a vacuum oven. Vibrating sample magnetometer (VSM) measurements were applied to characterize the magnetic properties. This film features hard magnetic properties with an intrinsic coercivity Hci of up to 44 kA/m. Electron probe microanalysis (EPMA) measurements showed that up to 40 at. % of O may be integrated in these films. The phases in the deposited films were determined by applying X-ray diffraction (XRD) measurements. These films consist of a mixture of SmCo alloy, Sm oxide, and Co.
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