Abstract
We have processed strontium-modified potassium sodium niobate (KNNSr) piezoelectric thick films on metalized alumina by electrophoretic deposition and sintering for energy-harvesting applications. The deposition yield, the electric field in the close vicinity of the planar working electrode (calculated with a finite-element method) and the thickness profiles of the as-deposited layers were examined for ethanol-based suspensions with different conductivities, deposition times, inter-electrode distances and sizes of the counter electrode. Uniformly thick and defect-free, as-deposited KNNSr layers were processed from a suspension with a conductivity of 21.2μS/cm, deposited for 90s, for an inter-electrode distance of 3mm and a diameter of the counter electrode similar to the sample’s dimensions. KNNSr layers sintered at 1100°C with a thickness of 30μm and a relative density of 75% exhibited a dielectric permittivity of 325, dielectric losses of 0.04 at 10kHz and room temperature, and a d33 coefficient of 60pC/N.
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