Abstract
Large flow rates per applied potential are obtained from electroosmotic (EO) pumps fabricated from n-type porous silicon. Porous silicon membranes have ideal geometries for EO pumping. These membranes have hexagonally packed, uniform pores with near-unity tortuosity and are well suited to maximize flow rate for a given applied voltage. The 350 μm thick membranes were passivated with a SiO2 layer and exhibit a maximum flow rate of 1.2 ml/min/cm2/V. This is 4.4 times higher than previously demonstrated silica-based frit EO pumps. LPCVD polysilicon deposition followed by wet oxidation was used to control the pore size. The impact of these coatings on the pump performance has also been characterized.
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