Abstract
Electro-optic Mach-Zehnder interferometric (MZI) modulators have been fabricated by proton exchange in LiTaO<sub>3</sub>. Electro-optic efficiency of these modulators has been found to be depending on phase composition of H<sub>x</sub>Li<sub>1-x</sub>TaO<sub>3</sub> waveguide in full accordance with the data of Raman scattering spectroscopy on microscopic contributions in electro-optic effect for the different H<sub>x</sub>Li<sub>1-x</sub>TaO<sub>3</sub> phases. These spectroscopy data were used to found an appropriate phase composition and, thus, optimize MZI modulators. The experimental samples of MZI modulator fabricated at the optimal technological conditions exhibit the improved electro-optical efficiency with far superior photorefractive resistance compared to the LiNbO<sub>3</sub> waveguides and modulators.
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