Abstract
The objective of this study is to exhibit the capability of Monte-Carlo simulation in the frame of surface spectroscopy using elastically reflected electrons. Our computer programme is based on sample descriptions as stackings of atomic layers. Results allow us information on important parameters as the penetration depth of the electron beam or angular reflections. The programme has the capability for performing 3 D mapping of the backscattered electrons. Measurements of the percentage of the reflected current are depending on the geometry of the analysis system. This can be shown by the relief of the three dimensional patterns.
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