Abstract

The property of the TiN/vacuum interface in ultrahigh vacuum and under electron beam irradiation is studied using Auger electron spectroscopy. About one monolayer of oxygen adsorbs on the surface and metal oxidation occurs. The characteristic of oxygen adsorption is discussed. Under electron irradiation with energies ranging from 1 keV to 9 keV, carbon accumulates on the surface, in addition to oxygen adsorption, which modifies the surface chemistry to an extent that depends on the vacuum conditions, electron current density and electron beam energy. High-energy electrons induce TiC formation.

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