Electronics and sensors based on pyroelectric AlGaN/GaN heterostructures – Part B: Sensor applications

Abstract

In the present article recent results concerning sensor applications of AlGaN layers and AlGaN/GaN heterostructures are summarized. The piezoresistive effect in piezoelectric AlGaN layers is investigated and the dependence of the piezoresistive gauge factor on the Al content is attributed to the influence of strain induced piezoelectric fields. An enhancement of this effect is observed in AlGaN/GaN heterostructures resulting in high longitudinal gauge factors. The response of gas sensitive Pt:GaN Schottky diodes to hydrogen and hydrogen containing gases is analyzed up to temperatures of 600 °C and employed to realize gas sensitive field effect transistors which are demonstrated to operate up to 400 °C. In addition, ion sensitive field effect transistors (ISFETs) have also been fabricated on the basis of AlGaN/GaN heterostructures. The GaN surface shows a high pH sensitivity which is attributed to the presence of a thin native metal oxide layer on the surface. (© 2003 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)