Abstract
Abstract A N + 2 implantation technique was employed to improve the surface hardness of stainless steel, and the electronic structures and nitride formation of the ion-implanted layer were investigated and compared with those produced using other techniques, including plasma nitriding. AISI 304L austenite stainless steel was irradiated by 80 keV N + 2 with a dosage ranging from 1.0×10 16 to 1.0×10 18 ions cm −2 at room temperature. The formation of various nitrides was confirmed by X-ray diffraction. The quantitative hardness of the samples was measured by using a Knoop microhardness tester. X-ray photoelectron spectroscopy was also carried out to elucidate the chemical states and electronic structures of the ion-implanted layers. The measurements were repeated after post-annealing at 400 °C for 1 h in a high vacuum. Changes in phase, chemical state and electronic structures were observed according to the ion dose and heat treatment.
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