Abstract

The electronic structure, charge distribution, and charge transfer in α-and β- Si3N4 and at the Si(111)/Si3N4(001) interface havebeen studied using a self-consistent first-principles LCAO method. Thecalculated charge transfer suggests that both in α- and β-phases,the ionic formula may be written as Si3+1.24N4−0.93. For the Si(111)/Si3N4(001) interface, the silicon atoms from the Si(111) sidegive some electrons to the N atoms of Si3N4 forming the Si-N bonds atthe interface. One Si-N bond is associated with a charge transfer of about 0.31electrons.

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