Abstract
The electronic properties of the 3d transition metal impurities iron and cobalt in crystalline germanium have been investigated by means of deep level transient spectroscopy. The metals were implanted at 90 keV and diffused deeper into the bulk during a thermal anneal at 500 °C, which yielded spectra specific for the implanted metal. It was found that Fe introduces one deep electron trap and one deep hole trap. For Co, one deep electron trap and two hole traps were observed. The capture cross-section of both electron and hole traps has been directly measured. The results are in agreement with the metals being present on substitutional lattice sites forming multiple acceptor states. It is concluded that Fe and Co are double acceptors in germanium, with Co having an additional donor level close to the valence band.
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