Abstract
An electronic nose (e-nose) for identification and quantification of volatile organic compounds (VOCs) vapor mixtures was developed using nanopore-enhanced opto-calorimetric spectroscopy. Opto-calorimetric spectroscopy based on specific molecular vibrational transitions in the mid infrared (IR) "molecular fingerprint" regime allows highly selective detection of VOCs vapor mixtures. Nanoporous anodic aluminum oxide (AAO) microcantilevers, fabricated using a two-step anodization and simple photolithography process, were utilized as highly sensitive thermomechanical sensors for opto-calorimetric signal transduction. The AAO microcantilevers were optimized by fine-tuning AAO nanopore diameter in order to enhance their thermomechanical sensitivity as well as their surface area. The thermomechanical sensitivity of a bilayer AAO microcantilever with a 60 nm pore diameter was approximately 1 μm/K, which is far superior to that of a bilayer plain silicon (Si) microcantilever. The adsorbed molecules of VOCs mixtures on the AAO microcantilever were fully recognized and quantified by variations of peak positions and amplitudes in the opto-calorimetric IR spectra as well as by shifts in the resonance frequency of the AAO microcantilever with the adsorbed molecules. Furthermore, identification of complex organic compounds with a real industrial sample was demonstrated by this e-nose system.
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