Abstract
One- and two-electron non-adiabatic models of ion formation in sputtering are briefly reviewed and compared with experiments on ion emission from Cu and from GaAs. Using these examples it is shown that in order to explain the experiments the models must be extended and must include substrate excitations described tentatively by an electronic temperature. Such approach allows for a consistent elucidation of the experimental data. Possible consequences of many-electron excitation processes for electron emission from bombarded solids are also considered.
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