Abstract
Sputtering of a LiF(100) surface by singly (He and Ar) and doubly charged rare gas ions (Ar) with impact energies between 20 and 500 eV has been performed. The emission of Li +, Li 0, F + and F 0 was measured by means of a quadrupole mass spectrometer.The yield of sputtered Li + ions and Li 0 atoms decreases with decreasing impact energy and becomes slightly higher for Ar ++ compared to Ar + at impact energies below 100 eV. The situation changes very drastically when looking at the emitted F particles. In the whole energy range investigated, the F + and F 0 yield was more than one magnitude larger for Ar ++ as projectiles than for Ar +. Furthermore, for He + bombardment a higher yield was observed than for Ar +. Therefore an electronic effect has to be assumed which causes enhancement of the sputtering of F + if projectiles with larger potential energy are used. However, for He + below 100 eV impact energy, a drastic decrease for the F + yield was observe-which indicates that F + emission cannot be due to a pure electronic effect. Our proposed model includes formation of F + by Auger neutralization (if energetically possible) of projectiles in front of the target, and emission of the F + ion due to momentum transfer in the collision with the already neutralized projectile.
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