Abstract
CoSi 2 layer-Si(111) system is studied by soft X-ray spectroscopic technique. It is found that Si(L 2,3) soft X-ray emission band spectra of CoSi 2 single crystal exhibit different features from that of Si single crystal, and suggested that the top of valence band CoSi 2 occupied with s electrons of Si atoms which make the chemical bond between Co and Si atoms. A depth profile analysis with non-destructive method is carried out for a thin Co silicide layer-Si(111) system.
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