Abstract

Electron beam (EB) irradiation experiments on Indium-tin (In-Sn) alloy thin films are reported. The structure and the optical properties of the samples were investigated by atomic force microscopy, X-ray diffraction, UV-vis-NIR double beam spectrometer and Raman system, respectively. Those results show that EB irradiation has the effects of changing the preferred orientation, improving the crystalline, enhancing the absorption, and improving the surface-enhanced Raman scattering (SERS) of samples. In addition, Finite-Difference Time-Domain (FDTD) was performed for the surface plasmon resonance properties of the as-irradiated samples, and the results are in good agreement with the experiments.

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