Abstract
The electron velocity distribution (EVD) in low pressure inductively coupled plasmas (ICPs) is heavily influenced by nonlinear Lorentz forces which are most significant at low pressures and low-excitation frequencies. In this paper, images of the EVD in an ICP sustained in argon are discussed. Within the electromagnetic skin depth, the EVD is highly elongated in the axial and azimuthal directions. This anisotropy dissipates as the electron swarm crosses the plasma.
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