Abstract
Electron microscope use an electron beam to obtain various kind of information about specimen. The electron beam is focussed by electrostatic and magnetic fields and electron detectors employ electrostatic fields to attract or deflect electrons. In many cases the demand to calculate the electron trajectories in a fast and visual way is very strong. One of the most important questions is the problem of the secondary electron (SE) trajectories inside the SEM chamber and the effect of sample charging on detector yield. This is especially important in the low voltage SEM when investigating an uncoated, non-conductive specimen. A relatively large number of calculated trajectories gives a possibility to optimize SE detector placement as well as detector bias.The main problem is solving the Laplace equation in a 3-D space. In the 3-D space composed of cubic cells of dimension Δ3, the Laplace equation takes the following form:
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