Abstract
Water-cooled aluminium segments are used as a double-probe system of large area to measure the electron temperature Te in argon discharges of 20-300 A cm−2 at 102-103 mTorr. The values of Te are in the range (2-6) × 104 K. Equations for the current-voltage characteristics of the probe are derived and compared with experiment.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Paper version not known
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
