Abstract

Volume production of hydrogen negative ions, H−, is studied in pure hydrogen plasmas using a grid bias method for plasma parameter control. The purposes of the present study are as follows: One is to investigate the possibility of controlling plasma parameters, in particular electron temperature Te, with a grid bias method in DC discharge plasmas: the other, to realize efficient negative ion production in H2 plasmas and to discuss the difference in Te control and H− production between the grid bias method and the usual magnetic filter method. Relationship between the extracted H− ion currents and plasma parameters is discussed. It is confirmed that both high and low Te plasmas are produced in the separated regions when the grid is negatively biased. The negative ion production depends strongly on the grid potential and related plasma conditions.

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