Electron temperature axial pattern in the RF discharge

Abstract

Summary form only given. This report presents the axial profiles of the electron temperature in the RF discharge in argon and air measured by a single probe technique. The pressure range under study was p=0.1-2 Torr, RF field frequency f=13.56 MHz, interelectrode spacing was L=22 mm. The applied RF voltage amplitudes were: 50, 200, 225, 250 and 350 V. The maxima of T/sub e/ are observed under intermediate pressures near the electrode sheath boundaries in the broad range of RF voltages. This increase is probably due to the stochastic heating of electrons colliding with oscillating boundaries of electrode sheaths. The phenomenon being known at low pressures (p/spl les/0.1 Torr).