Abstract
Electron stimulated desorption (ESD) from the surfaces of alkali halide (LiF, NaCl, KCl) and oxide (SiO 2, Al 2O 3, MgO) crystals was investigated by means of Auger electron spectroscopy (AES) and electron energy loss spectroscopy (EELS). The formation of metal islands on the surface of the insulator in the result of desorption was proved. The ESD cross section σ was obtained as a function of the primary electron beam energy through analyzing Auger spectra changes during the exposure to electron irradiation. σ ≈ 10 −17 cm 2 for alkali halides and σ ≈ 10 −22 cm 2 for oxides. The existence of volume plasmons in in was confirmed. It was shown that the presence of carbon contaminations on the surface resulted in a drastic decrease of the ESD cross section. Some experimental observations could not be explained in the frame of the KF-model. It was supposed that these results could be interpreted by taking into account the kinetics of the desorbed particles and the influence of the surface structure on the desorption process.
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