Abstract

Polycarbosilane (PCS) and polysilazane (PSZ) were pyrolyzed in Ar atmosphere at the temperatures between 500 and 2000K, and radicals produced were detected by ESR. The radical concentrations trapped in the pyrolyzed PCS and PSZ increased at two temperature regions during heat treatment. The increases in radical concentration were accompanied by the release of hydrogen gas during the pyrolysis.

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