Electron spectroscopic studies on FeNi alloys using ionization loss spectroscopy (ILS), Auger electron spectroscopy (AES) and elastic peak electron spectroscopy (EPES)

Abstract

FeNi alloys have been studied by electron spectroscopy varying the sampling depth of analysis with the primary energy of ILS and comparing it to AES. An on-line computer operated CMA analyzer was used at 2 and 3 keV primary energy. AES and ILS were based on LMM transitions and 2 p 3 2 shell electron excitation respectively of both Fe and Ni. Inelastic loss peaks were evaluated taking into account single elastic scattering. A simple formula is deduced containing Reimer's elastic cross sections. The electron IMFP needed for AES and ILS was determined by EPES. New IMFP values for FeNi alloys are presented. Quantitative analysis by ILS and AES provided reasonable agreement.