Abstract

ABSTRACTWe obtain valuable information about medium-range order in amorphous semiconductors from variable coherence microscopy, a new quantitative approach to TEM. The technique reveals three-body and higher-order atomic correlation functions, which are sensitive to medium-range order. Preliminary experimental evidence for structural changes on annealing has been found for amorphous semiconductor films, with pronounced medium-range order seen only in unannealed films.

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