Electron scattering cross sections forSF6andSF5CF3at intermediate and high energies(100–10000eV)

Abstract

A modified experimental apparatus with improved angular resolution and stability has been used to measure the total electron scattering cross sections for $\mathrm{S}{\mathrm{F}}_{6}$ and $\mathrm{S}{\mathrm{F}}_{5}\mathrm{C}{\mathrm{F}}_{3}$ in the energy range of $100--5000\phantom{\rule{0.3em}{0ex}}\mathrm{eV}$. A detailed analysis of the experimental error sources is provided. The experimental results are compared with integral elastic and inelastic cross sections calculated using the independent atom model approximation and a modified single-center additivity rule for electron energies ranging from $1\phantom{\rule{0.3em}{0ex}}\text{to}\phantom{\rule{0.3em}{0ex}}10,000\phantom{\rule{0.3em}{0ex}}\mathrm{eV}$. The accuracy of these approximations method is discussed through a comparison with the experimental results. Previous cross-sectional data for $\mathrm{S}{\mathrm{F}}_{6}$ are compared with the present theoretical and experimental results. For $\mathrm{S}{\mathrm{F}}_{5}\mathrm{C}{\mathrm{F}}_{3}$, we present the first electron scattering cross-sectional data for the $100--10,000\phantom{\rule{0.3em}{0ex}}\mathrm{eV}$ energy range, as well as the first empirical determination of the molecular polarizability.