Electron probe x-ray microanalysis with energy-dispersive x-ray spectrometry: The basics of x-ray spectrum interpretation

Abstract

Electron probe x-ray microanalysis (EPMA) with energy dispersive x-ray spectrometry (EDS) provides the capability for detecting elements with atomic number ≥ 4 (beryllium) from an excited specimen volume with linear dimensions of micrometers and a mass in the picogram range. To maximize the utility of EPMA/EDS, the analyst needs to understand the rich source of information that is potentially available in the x-ray spectrum. At its most basic level, interpretation of the spectrum consists of recognizing and identifying the various components of the spectrum as recorded by the EDS system: characteristic peaks, artifacts, and continuum background. While a modern EDS system is capable of making this interpretation in an automatic fashion, the careful analyst will always check the computer’s interpretation, which of course demands that the analyst be at least as "smart" as the computer! A systematic examination of spectra from pure elements or simple compounds is a good way to develop the necessary working knowledge.